Samco was the first of Japan's semiconductor process equipment manufacturers to obtain a Bosch Process license. Using our latest patented Tornado ICP® technology and harnessing the Bosch Process, Samco's Si DRIE systems have proven effective in deep, vertical, high-speed Si deep etching for both R&D and production. Also, Samco developed high precision processing at the nano level using ICP etching and RIE systems.

Deep Si etching (bosch process)

Si, Poly-Si, SiN etching