![](https://www.samco-plasma.cn/processes/uploads/microfluidic.jpg)
Bosch Process
The RIE-400iPB is used to fabricate microfluidic channels (3 ?m in width) by vertically processing Si.
Photo courtesy of Osaka University
The RIE-400iPB is used to fabricate microfluidic channels (3 ?m in width) by vertically processing Si.
Photo courtesy of Osaka University